Chemical-mechanical planarization of semiconductor materials M. R. Oliver (ed.)
Material type:
TextLanguage: English Series: Springer series in materials science ; 69Publisher: Berlin Heidelberg [u.a.] Springer 2004Description: X, 425 S illContent type: - Text
- ohne Hilfsmittel zu benutzen
- Band
- 3540431810
- chemical-mechanical
- 621.38152
- 621.3815/2
- 620
- TK7871.85
- ZM 7660
- ZN 4136
- VN 7150
- 53.56
- 33.72
- Archivierung/Langzeitarchivierung gewährleistet PEBW
- 2
| Item type | Current library | Call number | Materials specified | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
| Buch | MPI CPfS | ZM 4400 CHEM (Browse shelf(Opens below)) | Available | 10001100 |
Browsing MPI CPfS shelves Close shelf browser (Hides shelf browser)
| ZM 4300 ALLO Alloys and Intermetallic Compounds from Modeling to Engineering | ZM 4300 ALLO +2 Alloys and Intermetallic Compounds from Modeling to Engineering | ZM 4300 HIGH High-entropy alloys fundamentals and applications | ZM 4400 CHEM Chemical-mechanical planarization of semiconductor materials | ZM 4400 ELEM Elements of metallurgy and engineering alloys | ZM 4400 ELEM +2 Elements of metallurgy and engineering alloys | ZM 4400 META Metallografie mit einer Einführung in die Keramografie |
Includes bibliographical references and index
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