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Chemical-mechanical planarization of semiconductor materials

Chemical-mechanical planarization of semiconductor materials chemical-mechanical M. R. Oliver (ed.) - X, 425 S ill - Springer series in materials science 69 . - Springer series in materials science 69 .

Includes bibliographical references and index

ISBN: 3540431810 : $149,00 : CIP entry (Nov.)

Standard No.: 9783540431817 2003-59075

LCCN: 2003059075

Nat. Bib. Agency Control No.: 3540431810 UK

Subjects--Topical Terms:
Semiconductors--Materials
Chemical mechanical planarization
Semiconductors--Materials
Grinding and polishing

LC Class. No.: TK7871.85

Dewey Class. No.: 621.38152 621.3815/2 620

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Max Planck Institute for Chemical Physics of Solids - Library Catalog

Chemical-mechanical planarization of semiconductor materials