Max Planck Institute for Chemical Physics of Solids - Library Catalog

Chemical-mechanical planarization of semiconductor materials M. R. Oliver (ed.)

Contributor(s): Material type: TextTextLanguage: English Series: Springer series in materials science ; 69Publisher: Berlin Heidelberg [u.a.] Springer 2004Description: X, 425 S illContent type:
  • Text
Media type:
  • ohne Hilfsmittel zu benutzen
Carrier type:
  • Band
ISBN:
  • 3540431810
Other title:
  • chemical-mechanical
Subject(s): DDC classification:
  • 621.38152
  • 621.3815/2
  • 620
LOC classification:
  • TK7871.85
Other classification:
  • ZM 7660
  • ZN 4136
  • VN 7150
  • 53.56
  • 33.72
Online resources: Action note:
  • Archivierung/Langzeitarchivierung gewährleistet PEBW
  • 2
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Holdings
Item type Current library Call number Materials specified Status Date due Barcode
Buch MPI CPfS ZM 4400 CHEM (Browse shelf(Opens below)) Available 10001100

Includes bibliographical references and index

Archivierung/Langzeitarchivierung gewährleistet PEBW pdager DE-31

Archivierung prüfen 20240324 DE-4165 2 pdager

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