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Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Kiyotaka Wasa; Isaku Kanno; Hidetoshi Kotera

Contributor(s):

Material type: Text

TextLanguage: English Publisher: Amsterdam Boston Heidelberg [u.a.] Elsevier, William Andrew 2012Edition: 2. edDescription: XII, 644 S. Ill., graph. DarstContent type:

Text

Media type:

ohne Hilfsmittel zu benutzen

Carrier type:

Band

ISBN:

9781437734836

Subject(s):

Additional physical formats: Erscheint auch als: Handbook of sputter deposition technologyDDC classification:

621.3815/2 621.38152
621.38152
621.3815/2

LOC classification:

TS695

Other classification:

UP 7550
ZM 7620
ZN 4150
33.68

Action note:

Archivierung/Langzeitarchivierung gewährleistet PEBW DE-31
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Holdings ( 1 )
Title notes ( 5 )

Holdings
Item type	Current library	Call number	Materials specified	Status	Date due	Barcode
Buch	MPI CPfS	UP 7550 HAND (Browse shelf(Opens below))		Available		10006655

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Previous	UP 7550 BARA Fractal concepts in surface growth	UP 7550 CHEM The chemistry of metal CVD	UP 7550 ELEC Electrochemistry of nanomaterials	UP 7550 HAND Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS	UP 7550 PIER Handbook of chemical vapor deposition (CVD) principles, technology, and applications	UP 7550 PRIN Principles of chemical vapor deposition [what's going on inside the reactor]	UP 7550 VAPO Vapor deposition	Next

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Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Kiyotaka Wasa; Isaku Kanno; Hidetoshi Kotera

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