Max Planck Institute for Chemical Physics of Solids - Library Catalog

Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Kiyotaka Wasa; Isaku Kanno; Hidetoshi Kotera

Contributor(s): Material type: TextTextLanguage: English Publisher: Amsterdam Boston Heidelberg [u.a.] Elsevier, William Andrew 2012Edition: 2. edDescription: XII, 644 S. Ill., graph. DarstContent type:
  • Text
Media type:
  • ohne Hilfsmittel zu benutzen
Carrier type:
  • Band
ISBN:
  • 9781437734836
Subject(s): Additional physical formats: Erscheint auch als: Handbook of sputter deposition technologyDDC classification:
  • 621.3815/2 621.38152
  • 621.38152
  • 621.3815/2
LOC classification:
  • TS695
Other classification:
  • UP 7550
  • ZM 7620
  • ZN 4150
  • 33.68
Action note:
  • Archivierung/Langzeitarchivierung gewährleistet PEBW DE-31
  • 1
  • 2
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Holdings
Item type Current library Call number Materials specified Status Date due Barcode
Buch MPI CPfS UP 7550 HAND (Browse shelf(Opens below)) Available 10006655

Literaturangaben

Archivierung/Langzeitarchivierung gewährleistet PEBW DE-31 pdager DE-93

Archivierung prüfen 20240324 DE-4165 1 pdager

Archivierung prüfen 20250503 DE-640 2 pdager

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