TY  - BOOK
AU  - Hoffman,Dorothy M.
TI  - Handbook of vacuum science and technology
SN  - 0123520657
AV  - TJ940 
U1  - 621.5/5 21
PY  - 1998///
CY  - San Diego, Calif. [u.a.]
PB  - Academic Pr.
KW  - Vacuum
KW  - Vacuum technology
KW  - Handbooks, manuals, etc
N1  - Literaturangaben
UR  - http://www.loc.gov/catdir/description/els032/97026269.html
ER  -