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Cold plasma in materials fabrication from fundamentals to applications

Grill, Alfred

Cold plasma in materials fabrication from fundamentals to applications Alfred Grill - XIII, 257 S. graph. Darst.

Literaturangaben

ISBN: 0780310551 0780347145

Standard No.: PC0409-3

Publisher. No.: IEEE order No. PC0409-3

Subjects--Topical Terms:
Manufacturing processes
Plasma engineering
Low temperature plasmas

LC Class. No.: TA2020

Dewey Class. No.: 621.044

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Max Planck Institute for Chemical Physics of Solids - Library Catalog

Cold plasma in materials fabrication from fundamentals to applications